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Updated: Jun 4, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Multiphoton and Harmonic Imaging of Microarchitected Materials
Brian W Blankenship1, Daisong Pan2, Eudokia Kyriakou3,4
1Laser Thermal Laboratory, Department of Mechanical Engineering, University of California, Berkeley, California 94720, United States.
Multiphoton lithography (MPL) enables complex microstructures. Advanced imaging techniques like two-photon (2P), three-photon (3P), and third-harmonic generation (THG) microscopy provide high-fidelity 3D reconstructions for quality control.
Area of Science:
- Microfabrication and Advanced Imaging
- Materials Science and Engineering
Background:
- Microadditive manufacturing produces intricate nano- to microscale components.
- Multiphoton lithography (MPL) is a key technique for fabricating these complex structures.
Purpose of the Study:
- To evaluate two-photon (2P), three-photon (3P) fluorescence imaging, and third-harmonic generation (THG) microscopy for analyzing MPL-fabricated microstructures.
- To demonstrate the capability of these techniques for non-destructive defect detection and quality control.
Main Methods:
- Fabrication of periodic microarchitected lattice structures using MPL.
- High-fidelity 3D imaging using 2P and 3P fluorescence microscopy and THG microscopy.
- Utilizing refractive index matching fluids to enhance imaging depth and clarity.
Main Results:
- Achieved high-fidelity 3D reconstructions of both fluorescent and low-fluorescence microstructures.
- Demonstrated reduced signal decay with depth for multiphoton fluorescence (MPF) imaging compared to single-photon methods.
- Successfully identified internal modifications and compression-induced fractures non-destructively.
Conclusions:
- MPF imaging offers superior depth penetration for microadditively manufactured components.
- 2P, 3P, and THG microscopy are powerful tools for quality control and defect analysis in microfabrication.
- These advanced imaging techniques are crucial for ensuring the integrity of complex microscale components.
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