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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Brian W Blankenship1, Daisong Pan2, Eudokia Kyriakou3,4
1Laser Thermal Laboratory, Department of Mechanical Engineering, University of California, Berkeley, California 94720, United States.
Multiphoton lithography (MPL) enables complex microstructures. Advanced imaging techniques like two-photon (2P), three-photon (3P), and third-harmonic generation (THG) microscopy provide high-fidelity 3D reconstructions for quality control.
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