Investigating the link between a layer thickness and surface relief depth in an azo poly(ether imide)

Mateusz Nieborek1, Dariusz Szmigiel2, Paweł Komorowski3

  • 1Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662, Warsaw, Poland.

Scientific Reports
|January 3, 2025
PubMed

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