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Updated: Jun 3, 2025

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Selenium Interface Layers Boost High Mobility and Switch Ratios in van der Waals Electronics
Chi Zhang1,2, Enlong Li1,2, Caifang Gao1,3
1Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Department of Materials Science, Fudan University, Shanghai 200433, China.
Abstract:
Achieving high mobility while minimizing off-current and static power consumption is critical for applications of two-dimensional field-effect transistors. Herein, a selenium (Se) sacrificial layer is introduced between the rhenium sulfide (ReS2) semiconductor and source/drain electrode. With the Se layer and postannealing process, the ReS2 transistor significantly decreases the off-state current with a substantial increase in the on-state current density. Notably, the mobility reaches 237 cm2 V-1 s-1, which is accompanied by an extraordinary current on/off ratio of 1011 at 7 K. The theoretical calculations and noise analysis show that the improvement in device performance is ascribed to the Se protective layer, which effectively shields the semiconductor from direct exposure to high-energy metal particles, reducing the Schottky barrier and the number of defect states at the interface. Finally, Se sacrificial ReS2 transistor-based versatile logic circuits including NAND and NOR logic are executed, which can be widely applied in integrated circuits.
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