Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a priori and in real time the dynamic response of resonant devices is then crucial to guide the mechanical design and to support the MEMSs industry. In this work, we propose a simplified modeling procedure able to reproduce the nonlinear dynamics of MEMS resonant devices of arbitrary geometry. We validate it through the fabrication and testing of a cantilever beam resonator functioning in the nonlinear regime and we employ it to design a ring resonator working in the linear regime. Despite the uncertainties of a fabrication process available in the university facility, we demonstrate the predictability of the model and the effectiveness of the proposed design procedure. The satisfactory agreement between numerical predictions and experimental data proves indeed the proposed a priori design tool based on reduced-order numerical models and opens the way to its practical applications in the MEMS industry.