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Structural Design and Simulation of Multi-Detector Same-Platform Laser Gyro Reflector Substrate Defect Detection

Jun Wang1,2,3, Zhenyang Li2,3, Maoxin Song2,3

  • 1University of Science and Technology of China, Hefei 230026, China.

Micromachines
|January 8, 2025
PubMed
Summary
This summary is machine-generated.

This study introduces a prototype for detecting defects in laser gyroscope mirror substrates, achieving over 170 nm resolution. The stable design ensures reliable optical performance testing for critical laser gyroscope manufacturing.

Keywords:
fusion of light and dark fieldslaser gyromulti-detector same platformpatterned and unpatterned defect detectionstructural design

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Area of Science:

  • Optical Engineering
  • Materials Science
  • Metrology

Background:

  • Accurate defect detection is vital for manufacturing super-high reflector mirrors used in laser gyroscope systems.
  • Existing methods may lack the resolution or versatility for complex mirror substrates.

Purpose of the Study:

  • To present a prototype system for defect detection and classification on laser gyroscope mirror substrates.
  • To validate the prototype's performance for both reflection and transmission measurements on patterned and unpatterned surfaces.

Main Methods:

  • Developed a prototype with dual bright field and dark field measurement channels.
  • Utilized Ansys software for structural simulation of key components under transportation conditions.
  • Conducted experimental testing using laser gyroscope reflector substrates and USAF 1951 plates.

Main Results:

  • Ansys simulations confirmed prototype stability with a maximum static deformation of 4.65 μm and a resonant frequency above 230 Hz.
  • Experimental tests demonstrated effective defect detection on both reflection and transmission surfaces.
  • Achieved a defect detection resolution exceeding 170 nm, meeting design specifications.

Conclusions:

  • The prototype demonstrates robust structural stability suitable for optical performance testing.
  • The system effectively detects sub-micron defects on laser gyroscope mirror substrates.
  • The developed prototype meets the stringent requirements for laser gyroscope manufacturing.