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Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching.

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Summary

This study presents a novel Coriolis mass flow and density sensor utilizing selective wet etching for enhanced microfluidic channels. The new design significantly expands the flow range compared to standard Surface Channel Technology sensors.

Keywords:
Coriolis mass flow sensorHNA etchingmicrofluidic channelsurface channel technology

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Area of Science:

  • Microfluidics
  • Sensor Technology
  • Chemical Engineering

Background:

  • Standard Surface Channel Technology (SCT) Coriolis sensors have limited flow ranges.
  • Microfluidic channel design significantly impacts sensor performance characteristics like flow range and pressure drop.

Purpose of the Study:

  • To develop and evaluate a Coriolis mass flow and density sensor with an expanded flow range.
  • To investigate the impact of selective wet etching on microfluidic channel geometry and sensor performance.

Main Methods:

  • Fabrication of suspended microfluidic channels using selective wet etching.
  • Design of channels with a semi-elliptical cross-section (200 μm wide, 70 μm deep).
  • Testing sensor performance with water, isopropyl alcohol (IPA), and nitrogen (N2) for mass flow and density.

Main Results:

  • Achieved a significantly higher flow range of up to 50 g/h for water, a substantial increase from standard SCT sensors (1.2 g/h).
  • Maintained a low pressure drop of 1 bar at the maximum flow rate.
  • Demonstrated effective mass flow and density sensing capabilities for various fluids.

Conclusions:

  • Selective wet etching enables the creation of microfluidic channels with larger cross-sectional areas, leading to enhanced Coriolis sensor performance.
  • The developed sensor offers a superior flow range, making it suitable for a wider array of microfluidic applications.
  • The sensor's performance is validated across different fluid types, indicating its versatility.