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Updated: Jun 3, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Tailoring Super-Performed Chemo-Sensor via Simulation-Modeling and MEMS-Screening
Wei Xu1,2, Wukun Zhang1, Zhengqi Shen1
1State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai, 200050, China.
Abstract:
Chemo-sensor designing involves a time-consuming trial-and-error screening process, which commonly cannot lead to optimal S4R features (Sensitivity, Selectivity, Speed, Stability, and Reversibility). Due to strong path dependence on reported groups/mechanisms, conventional chemo-sensors often fail to meet critical application demands, especially in achieving high reversibility without compromising other features. Here, a three-step screen and design strategy is developed for gaining customized chemo-sensors, through Structure modeling; MEMS (Micro Electro Mechanical Systems) analysis, and Performance verification. With such a strategy, the coordination hanging anion mechanism is screened out for reversible nerve agent detection and shows reversible emission enhancement by 25.8 times with DCP, ultrasensitive vapor phase detection (5.7 ppb), and rapid response(10 s) and recovery speed (20 s). Such tailored designing strategy for new organic chemo-sensors will probably play an important role in developing high-performance sensing system in the future.

