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Updated: Jul 6, 2026

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers
Published on: December 27, 2012
Graphene-Integrated Microbolometer Array Imaging System: A Novel Approach for Fast and Sensitive Terahertz Detection
Rui Zhou1, Zhemiao Xie1, Jiaqi Wang1
1Advanced Micro-/Nano- Devices Lab, Department of Systems Design Engineering, University of Waterloo, 200 University Ave West, Waterloo, Ontario N2L 3G1, Canada.
Abstract:
Existing biomedical imaging modalities are often restricted by their substantial size, high costs, and potential risks associated with ionizing radiation exposure. Given these challenges, there is an urgent need for innovative imaging systems that not only excel in detection performance but are also compact, cost-effective, and ensure safety for biomedical applications. In response to these requirements, our research introduces an advanced terahertz (THz) microbolometer array imaging system (MAIS), specifically engineered for biomedical detection. At the core of this system is our novel microbolometer, which is distinguished by its unique structure and integration with graphene; its innovative design and strategic material composition substantially enhance the MAIS's efficacy. This graphene-integrated microbolometer demonstrates outstanding performance within the 1-5 THz operational bandwidth, achieving an average response time of 0.246 s, a peak responsivity of 8.95 × 105 V W-1, and an optimum detectivity of 5.97 × 108 cm Hz1/2 W-1. These exceptional metrics significantly extend our MAIS's applicability in nonionizing and noninvasive imaging, providing a robust solution for fast, sensitive, and accurate detection in biomedical contexts. This innovative study constitutes a considerable advancement in THz detection, with the potential to substantially transform the field of biomedical imaging.

