Design and Application of Uniaxially Sensitive Stress Sensor

Area of Science:

• Materials Science
• Electrical Engineering
• Mechanical Engineering

Background:

• Current stress sensors for microsystems present significant integration and signal decoding challenges.
• Existing solutions often lack the simplicity and efficiency required for widespread microsystem applications.

Purpose of the Study:

• To develop a real-time, uniaxially sensitive stress sensor for microsystems.
• To overcome the integration and signal decoding limitations of current stress sensing technologies.

Main Methods:

• The proposed sensor is constructed using simple combinations of bar resistors with differing axial sensitivities.
• A Wheatstone bridge configuration is employed for signal acquisition and amplification.
• The sensor's performance is validated through simulation and experimental testing.

Main Results:

• The sensor demonstrates a test sensitivity of 0.1 mV/V·MPa, closely matching the simulated value of 0.087 mV/V·MPa.
• The design allows for simple calibration to measure uniaxial stress magnitude.
• Bidirectional stress magnitude and direction can be detected through sensor rotation.

Conclusions:

• The developed stress sensor offers a structurally simple and procedurally straightforward solution.
• It exhibits improved temperature stability and reduced interface requirements compared to existing methods.
• This sensor is well-suited for the health monitoring of multi-chip microsystem chips.