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Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography
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Research on the DF-TSOM method for detecting subsurface defects of optical components.

Na Wang, Weihu Zhou, Xiaojiao Song

    Optics Express
    |January 29, 2025
    PubMed
    Summary

    A new dark field through-focus scanning optical microscopy (DF-TSOM) technique effectively detects 100-nanometer scale subsurface defects. This advanced method significantly improves contrast and sensitivity for transparent materials.

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    Area of Science:

    • Materials Science
    • Optical Physics
    • Metrology

    Background:

    • Detecting nanoscale subsurface defects is crucial for material integrity.
    • Traditional optical microscopy methods struggle with sub-micrometer defect detection.

    Purpose of the Study:

    • Introduce a novel dark field through-focus scanning optical microscopy (DF-TSOM) technique.
    • Enable detection of hundred-nanometer scale subsurface defects.

    Main Methods:

    • Experimental validation using prepared subsurface defect samples (1 µm to 0.1 µm diameters).
    • Comparison of DF-TSOM performance against traditional through-focus scanning optical microscopy (TSOM).

    Main Results:

    • DF-TSOM successfully detected subsurface defects as small as 0.1 µm in diameter.
    • Traditional TSOM failed to accurately detect defects smaller than 0.4 µm.
    • DF-TSOM demonstrated a tenfold improvement in contrast for 1 µm defects compared to TSOM.

    Conclusions:

    • DF-TSOM offers a highly sensitive and contrast-enhanced approach for subsurface defect detection.
    • The technique simplifies hardware setup and shows potential for online monitoring.
    • This method advances the capability for nanoscale defect inspection in transparent materials.