Single-drive 2-DOF wideband micromirror via mode interaction.

Area of Science:

• MEMS (Micro-Electro-Mechanical Systems)
• Optomechanics
• Nanotechnology

Background:

• Micromirror technology is crucial for various applications, including optical switching and sensing.
• Existing dual-axis resonant micromirrors often have complex structures and limited operating frequency bands.
• The need for simplified, robust micromirror solutions for portable devices in challenging environments is growing.

Purpose of the Study:

• To propose and validate a novel electrostatic 2-DOF micromirror structure utilizing internal resonance.
• To achieve synchronous motion of two axes with a locked frequency ratio under a single driving force.
• To enhance the operating frequency band and simplify the mechanical structure of dual-axis micromirrors.

Main Methods:

• Design of a novel electrostatic 2-DOF micromirror with double-biased torsional axes.
• Introduction of internal resonance to achieve synchronous motion and frequency locking.
• Theoretical modeling and macroscopic experimental verification of the 1:2 internal resonance.
• Structural optimization for band expansion.

Main Results:

• Achieved synchronous motion of two axes with a locked frequency ratio over a wide frequency range.
• Demonstrated a 1:2 internal resonance experimentally.
• Simulation results show a potential band expansion of at least 135.58% through structural optimization.
• The proposed micromirror offers a significant increase in operating band with minimal reduction in vibration amplitude.

Conclusions:

• The novel internal resonance micromirror significantly simplifies dual-axis designs and broadens the operating frequency band.
• This technology provides a robust chip solution for portable devices operating in complex environments.
• The simplified structure reduces processing costs and improves manufacturing reliability.