Carbon Dioxide Sensing Based on Off-Axis Integrated Cavity Absorption Spectroscopy Combined with the Informer and...

Off-axis integrated cavity output spectroscopy (OA-ICOS) allows the laser to be reflected multiple times inside the cavity, increasing the effective absorption path length and thus improving sensitivity. However, OA-ICOS systems are affected by various types of noise, and traditional filtering methods offer low processing efficiency and perform limited feature extraction. Deep learning models enable us to extract important features from large-scale, complex spectral data and analyze them efficiently and accurately. We propose a carbon dioxide (CO₂) sensor operating in the near-infrared spectral region (1.602 μm) based on OA-ICOS and deep learning models. A radiofrequency (RF) noise source is employed to reduce the cavity-mode noise in OA-ICOS and thus improve the signal-to-noise ratio (SNR). A time-series-based neural network, known as the informer, is employed for filtering CO₂ spectral time series. After filtering, spectral features are directly extracted from the filtered spectral data and CO₂ concentrations are predicted using a multilayer perceptron (MLP) model. Our results showed that the SNR attained using informer filtering approximately double those obtained using traditional filtering methods (Savitzky-Golay filtering, Kalman filtering, and wavelet threshold). The linear correlation coefficient (R²) between measured concentrations and standard concentrations was increased from 79.74% (obtained by using the absorption-peak-fitting method) to 98.52% (obtained by using the proposed MLP model). Moreover, the detection limit of the CO₂ sensor using the MLP model reached 1.38 ppm at 224.4 s, a 3.79-fold improvement compared to that obtained by using the absorption-peak-fitting method. Our results demonstrate the feasibility of integrating deep learning methods in the field of spectroscopy-based sensing and provide a promising approach for spectral data processing.