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A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Akiko Ueda1, Hiroyuki Akinaga2, Sapan Agarwal3
1Research Center for Emerging Computing Technologies, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan.
Environmental, safety, health, and sustainability (ESHS) are critical in semiconductor manufacturing. This study explores
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