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Updated: May 30, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Monolithic electrostatic actuators with independent stiffness modulation

Yuejun Xu1, Jian Wen1,2, Etienne Burdet1

  • 1Department of Bioengineering, Imperial College London, London, UK.

Nature Communications
|January 30, 2025
PubMed

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