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Updated: May 30, 2025

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Au-In Alloy for Excellent Ohmic Contact in GeSe Devices with Enhanced Photodetector Properties
Ruowang Chen1, Hui Shi1, Yu Liu2
1Key Laboratory of MEMS of Ministry of Education, School of Integrated Circuits, Southeast University, Nanjing 210096, China.
Abstract:
Metal-semiconductor contact plays a significant role in devices such as transistors, photoemitters, and photodetectors. Here, the AuIn alloy contact gives a state-of-the-art low RC (contact resistance) in GeSe devices. The RC of GeSe-AuIn is measured to be 25 kΩ μm under channel carrier concentration around p = 2.490 × 1010 cm-2. This low RC is ascribed to a small barrier height of 16 meV. Our density functional theory calculation found the formation of a high conductive metallic GeSe-AuIn interface due to indium doping, which screens the possible interface disorder-induced gap states and metal-induced gap states that are observed when using pure In (indium) or Au (gold) metal. The GeSe-AuIn photodetectors show enhanced photoresponsivity with a specific photoresponsivity of 6.46 × 104 A/W and a detectivity of 8.9 × 1013 Jones (at 450 nm wavelength). Our study is helpful in designing high-performance GeSe-based devices.
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