Medium-assisted scalable printing of LIPSS via femtosecond laser projection manufacturing

Femtosecond laser has been widely applied for manufacturing micro-/nanostructures in micro-optics, microelectronics, and biomedical engineering. However, tight focusing remains restricted by efficiency, and large-field scanning with a scanning mirror sacrifices precision. In this paper, we proposed a medium-assisted femtosecond laser projection manufacturing (MA-FPM) approach, which enables the fabrication of controllable patterns that incorporate 115 nm periodic laser-induced periodic surface structures (LIPSS). We demonstrated the capability of this technology in fabricating different patterns and pattern arrays. Additionally, we illustrated the application of the micro-nanostructures in plasmon enhancement through Raman spectroscopy. The MA-FPM technique holds promise for metasurface, biosensing, label-free microscopy, and tissue engineering.