Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron

Zehao Dong1, Yang Zhang1, Chun-Chien Chiu2

  • 1State Key Laboratory of Low Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing, China.

Nature Communications
|January 31, 2025
PubMed
Summary

This study introduces a new 3D imaging method using electron ptychography to achieve sub-nanometer depth resolution for atomic structures. The technique enhances dopant detection and visualization in materials science.