Related Experiment Video
Updated: Jun 19, 2026

Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition
Published on: May 15, 2015
A strategy for increasing the breakdown field strength beyond the experimental scaling law in yttria films
Tomohiko Nakajima1, Yuuki Kitanaka1, Iwao Yamaguchi1
1Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan. t-nakajima@aist.go.jp.
Abstract:
Aiming to increase the dielectric breakdown field strength (Ebf) of yttria films for application in semiconductor manufacturing, a synthetic strategy based on photo-assisted chemical solution deposition was developed to prepare yttria films with aggregates of very small nanocrystallites. Despite containing many elliptical pores, the films exhibited an Ebf exceeding 12.7 MV cm-1, much higher than that predicted according to conventional experimental scaling laws. The combination of nanocrystallite agglomerates and elliptical pores, generally seen as defects, provides a new strategy for increasing the Ebf.
More Related Videos
09:41Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides
Published on: May 29, 2018
06:49Radio Frequency Magnetron Sputtering of GdBa2Cu3O7âˆ'ÃŽ ´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates
Published on: April 12, 2019
Related Concept Videos
Yield Criteria for Ductile Materials under Plane Stress
The Maximum Shearing Stress Criterion, also known as the...
Methods of Medium Optimization