Global Least Squares Algorithm for 3D Elemental Surface Topography Reconstruction Using Quad-Segment Detector in

Ebrahim Gholami Hatam1, Primož Pelicon2

  • 1Department of Physics, Faculty of Science, Malayer University, Malayer, Iran.

Summary

This study introduces a new method for 3D surface topography reconstruction in micro-particle-induced X-ray emission (micro-PIXE) analysis. This technique overcomes shadow effects caused by surface irregularities, improving elemental mapping accuracy.