Single-Molecule-Sensitive Three-Dimensional Atomic Heterostructures with Extreme Light-Matter Coupling

Yi-Jui Yeh1,2, Shao-Yu Chen2, Wesley Wei-Wen Hsiao1

  • 1Department of Chemical Engineering, National Taiwan University of Science and Technology, Taipei 10607, Taiwan.

Summary

Plasma-assisted epitaxy enables novel three-dimensional heterostructures (3DHS) for ultrasensitive single-molecule detection. This scalable nanofabrication method offers a new platform for advanced biosensing and nanoelectronic applications.