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An Efficient MEMS Microelectrode Array with Reliable Interelectrode Insulation Processes for In Vivo Neural Recording
Qingda Xu1,2, Longchun Wang1,2, Ye Xi1,2
1National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai, 200240, China.
Small (Weinheim an Der Bergstrasse, Germany)
|February 12, 2025
Summary
This study introduces a novel bonded microelectrode array (BMEA) with a simplified fabrication process for enhanced neural recording. The BMEA demonstrates efficient in vivo signal acquisition and biocompatibility, paving the way for advanced brain-computer interfaces.
Area of Science:
- Neuroscience
- Materials Science
- Biomedical Engineering
Background:
- Utah arrays are crucial for brain-computer interfaces but have complex fabrication.
- Existing glass-fused structures limit functional expansion and are costly.
- A need exists for simplified, efficient, and cost-effective microelectrode array fabrication.
Purpose of the Study:
- To develop a novel microelectrode array with a simplified and time-saving fabrication process.
- To improve production efficiency and process compatibility using anodic bonding.
- To enhance neural recording capabilities and biocompatibility for clinical applications.
Main Methods:
- Utilized low-resistance silicon and borosilicate glass wafers for electrodes and insulation.
- Employed anodic bonding for improved production efficiency.
- Applied a one-step static wet etching process for microneedle formation.
- Sputtered iridium oxide as the electrode interface material.
Main Results:
- Successfully fabricated a bonded microelectrode array (BMEA) with a simplified process.
- Achieved significantly reduced electrochemical impedance using iridium oxide.
- Demonstrated non-cytotoxicity through cellular experiments.
- Recorded in vivo electrical signals from the primary visual cortex of mice within 15 days.
- Confirmed good behavioral activity in mice post-implantation.
Conclusions:
- The BMEA offers a universal and effective tool for neural recording.
- The simplified fabrication process enhances production efficiency and compatibility.
- Prospective applications include multi-physiological monitoring and microelectromechanical system integration.
