Spectroscopic Ellipsometry and Correlated Studies of AlGaN-GaN HEMTs Prepared by MOCVD

A series of AlGaN/GaN high-electron-mobility transistor (HEMT) structures, with an AlN thin buffer, GaN thick layer and Al_0.25Ga_0.75N layer (13-104 nm thick), is prepared by metal-organic chemical vapor deposition and investigated via multiple techniques. Spectroscopic ellipsometry (SE) and temperature-dependent measurements and penetrative analyses have achieved significant understanding of these HEMT structures. Bandgaps of AlGaN and GaN are acquired via SE-deduced relationships of refraction index n and extinguish coefficient k vs. wavelength λ in a simple but straightforward way. The optical constants of n and k, and the energy gap E_g of AlGaN layers, are found slightly altered with the variation in AlGaN layer thickness. The Urbach energy E_U at the AlGaN and GaN layers are deduced. High-resolution X-ray diffraction and calculations determined the extremely low screw dislocation density of 1.6 × 10⁸ cm^-2. The top AlGaN layer exhibits a tensile stress influenced by the under beneath GaN and its crystalline quality is improved with the increase in thickness. Comparative photoluminescence (PL) experiments using 266 nm and 325 nm two excitations reveal and confirm the 2DEG within the AlGaN-GaN HEMT structures. DUV (266 nm) excitation Raman scattering and calculations acquired carrier concentrations in compatible AlGaN and GaN layers.