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Novel MEMS Multisensor Chip for Aerodynamic Pressure Measurements.
Žarko Lazić1, Milče M Smiljanić1, Dragan Tanasković1
1Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njegoševa 12, 11000 Belgrade, Serbia.
Sensors (Basel, Switzerland)
|February 13, 2025
Summary
Researchers developed a novel MEMS multisensor chip for aerodynamic testing. This integrated chip enhances pressure measurement accuracy and miniaturization for vehicles, aircraft, and structures.
Area of Science:
- Aerospace Engineering
- Mechanical Engineering
- Materials Science
Background:
- Multichannel pressure measurement instruments (pressure scanners) are crucial for aerodynamic testing of vehicles, aircraft, and structures.
- Existing pressure scanners face limitations in miniaturization, channel density, and measurement performance.
- Temperature sensors are often included for compensation, adding to bulk and complexity.
Purpose of the Study:
- To develop and realize an innovative MEMS multisensor chip to overcome limitations of traditional pressure scanners.
- To achieve higher pressure channel density per unit area through monolithic integration.
- To improve sensor matching and thermal coupling for enhanced measurement performance.
Main Methods:
- Preliminary and final chip design incorporating MEMS piezoresistive pressure sensors and resistive temperature sensors.
- Numerical simulations to analyze the chip's mechanical behavior under pressure.
- Fabrication processes including photolithography, deposition, micromachining, and anodic bonding.
- Electrical testing for performance validation.
Main Results:
- Successful monolithic integration of four MEMS pressure sensors and two temperature sensors on a single chip.
- Demonstrated potential for high channel density and improved sensor matching and thermal coupling.
- Development of a compact and high-performance solution for aerodynamic testing.
Conclusions:
- The developed MEMS multisensor chip offers a significant advancement over conventional pressure scanners.
- Monolithic integration enables miniaturization and improved performance for aerodynamic testing applications.
- This innovative chip addresses the growing demands for high-density, high-performance pressure measurement.
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