A Large Voltage Responsivity Pyroelectric Sensor Based on Hot-Pressed Lead Zirconate Titanate Ceramic

In this article, hot-pressed PZT ceramics were used as a sensitive element material and made into a pyroelectric chip. Three current mode sensors were fabricated using a pyroelectric chip of different thicknesses (80 μm, 40 μm, and 30 μm). The voltage responsivity of sensors reached the order of magnitude of 10⁵. The size effect resulting from varying the thickness was studied. The results indicate that as the thickness decreases, the performance significantly increases. When the modulation frequency is 10 Hz, the specific detectivity of the sensor with a 30 μm PZT ceramic pyroelectric chip reaches 5.3 × 10⁸ cm·Hz^1/2/W.