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Updated: May 28, 2025

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx
Published on: May 13, 2020
Discrete Ferroelectric Polarization Switching in Nanoscale Oxide-Channel Ferroelectric Field-Effect Transistors
Yanjie Shao1, Elham Rafie Borujeny1, Jorge Navarro Fidalgo1
1Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States.
Abstract:
In this work, we study polarization switching behavior in scaled hafnium-zirconium oxide (HZO) ferroelectric (FE) field-effect transistors with an amorphous oxide-semiconductor channel with dimensions down to the FE domain level. Channel thickness scaling acts as an effective approach to memory window (MW) enhancement. With an indium-tin oxide channel thickness of 2.5 nm, we demonstrate a large MW of 2.2 V. Discrete FE polarization switching is observed in narrow- and short-channel transistors, where a small number of FE domains are involved. Based on a detailed MW scaling study with channel length, we estimate the size of the FE domain in our HZO to be ∼40 nm. Fatigue experiments in nanoscale transistors reveal the dominant role of FE domain pinning, which leads to negative threshold voltage shift and degraded MW. Our results open up a new avenue for probing FE physics based on single domain behavior.
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