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Updated: May 5, 2026

Free-form Light Actuators — Fabrication and Control of Actuation in Microscopic Scale
Published on: May 25, 2016
Crossing the Dimensional Divide with Optoelectronic Tweezers: Multicomponent Light-Driven Micromachines with Motion
Gong Li1, Bingrui Xu2, Xiaopu Wang3,4
1School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, 100081, China.
Abstract:
Micromachines capable of performing diverse mechanical tasks in complex and constrained microenvironments are of great interest. Despite important milestones in this pursuit, until now, micromachines are confined to actuation within a single 2D plane due to the challenges of transferring motion across different planes in limited space. Here, a breakthrough method is presented to overcome this limitation: multi-component micromachines that facilitate 3D motion transfer across different planes. These light-driven 3D micromachines, fabricated using standard photolithography combined with direct laser writing, are assembled and actuated via programmable light patterns within an optoelectronic tweezers system. Utilizing charge-induced repulsion and dielectrophoretic levitation effects, the micromachines enable highly efficient mechanical rotation and effective inter-component motion transfer. Through this work, fascinating patterns of similarities are unveiled for the new microscale 3D systems when compared with the macro-scale world in which they live, paving the way for the development of micromechanical devices and microsystems with ever increasing functionality and versatility.

