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Related Experiment Video

Updated: May 28, 2025

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation
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Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

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Compact microsphere self-interference lithography for polarization-controlled laser parallel nanofabrication.

Zhiwen Gao, Zhiyang Xu, Wei Liang

    Optics Letters
    |February 14, 2025
    PubMed
    Summary
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    We developed a new laser nanofabrication method using microsphere arrays to create periodic units with nanopatterns. This technique enables high-throughput parallel fabrication for advanced applications.

    Area of Science:

    • Nanotechnology
    • Optical Engineering
    • Materials Science

    Background:

    • Microsphere-based lithography offers potential for nanoscale patterning.
    • Existing methods often lack high throughput or precise control over pattern types.

    Purpose of the Study:

    • To develop a compact, high-throughput method for parallel nanofabrication of periodic units with nanopatterns (PUNs).
    • To demonstrate control over nanopattern features (nanoholes, nanogrooves, nanoslots) using laser polarization.
    • To explore the application of fabricated PUNs in surface-enhanced Raman spectroscopy (SERS).

    Main Methods:

    • Utilizing a single laser beam incident on a self-assembled dual-layered microsphere array for interference lithography.
    • Employing polarization control of the incident laser to generate different nanopatterns.

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  • Developing an analytical model for polarization-dependent tri-beam interferences to explain PUN formation.
  • Main Results:

    • Achieved parallel fabrication of PUNs with minimum linewidth of 75 nm (λ/4.5) over a 1 cm² area.
    • Demonstrated fabrication of nanoholes (NHs), nanogrooves (NGs), and nanoslots (NSs) by varying laser polarization.
    • Developed Au-coated PUNs exhibiting tunable polarization sensitivity and a limit of detection down to 3 × 10⁻¹⁰ M for SERS.

    Conclusions:

    • The developed microsphere self-interference lithography enables high-throughput, parallel nanofabrication with controlled pattern types.
    • The fabricated PUNs show promise as customized SERS substrates with tunable polarization sensitivity.
    • This technique opens new avenues for laser parallel nanofabrication across diverse applications.