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Progress in element analysis on a high-voltage electron microscope.

W F Tivol, D Barnard, T Guha

    Scanning Electron Microscopy
    |January 1, 1985
    PubMed
    Summary
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    X-Ray microprobe (XMA) analysis is useful for qualitative elemental analysis. Electron energy-loss spectrometry (EELS) requires further development for quantitative biological specimen analysis due to high background levels.

    Area of Science:

    • Materials Science
    • Analytical Chemistry
    • Microscopy

    Background:

    • High-voltage electron microscopes (HVEM) are powerful tools for materials analysis.
    • Integrating X-Ray microprobe (XMA) and electron energy-loss spectrometers (EELS) enhances analytical capabilities.
    • Current limitations exist in EELS sensitivity and background noise for biological samples.

    Purpose of the Study:

    • To report the installation and initial performance of XMA and EELS on an HVEM.
    • To assess the current capabilities and limitations of the integrated system.
    • To outline ongoing improvements for enhanced analytical accuracy and sensitivity.

    Main Methods:

    • Installation of XMA and EELS spectrometers on a high-voltage electron microscope.
    • Measurement of probe size for XMA and EELS.

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  • Ongoing development for background reduction in XMA and EELS.
  • Improvements in electron optics and sensitivity measurements for EELS.

    • Main Results:

    • XMA is currently capable of qualitative elemental analysis.
    • Several researchers have utilized the XMA for elemental analysis.
    • EELS currently exhibits background levels too high for meaningful quantitative results.
    • Development of standards for biological specimens is underway.

    Conclusions:

    • The integrated XMA-HVEM system is valuable for qualitative elemental analysis.
    • Further optimization of EELS is necessary for quantitative analysis of biological specimens.
    • Compilation of a standard library is crucial for advancing quantitative EELS applications.