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Updated: May 24, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Revisiting the Formulation of Charged Defect in Solids
Hanzhi Shang1, Zeyu Jiang1, Yiyang Sun1
1Rensselaer Polytechnic Institute, Department of Physics, Applied Physics and Astronomy, Troy, New York 12180, USA.
Abstract:
Defect physics is at the heart of microelectronics. By keeping track of the reference energy in total energy calculations, we explicitly show that the "potential alignment" correction vanishes, and the classic Makov-Payne correction yields accurate results. From linear response theory, we further formulate an accurate expression for the quadrupole correction. Application to numerous defects including anisotropic material yields accurate formation energies in small supercells, and the historically slow convergence of the 2+ diamond vacancy is shown to be a result of slow varying gap levels of the defect leading to a size-dependent dielectric constant.
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