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Updated: May 24, 2025

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Shangye Ma1, Samuel J Baxter1, Changyong Park2
1School of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, Georgia 30332-0400, United States.
Scandium trifluoride exhibits negative thermal expansion and incorporates helium under pressure, forming a defect perovskite. Helium incorporation stiffens the structure and alters its phase transition behavior, impacting its quantum structural phase transition pressure.
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