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Pre-Charged Collapse-Mode Capacitive Micromachined Ultrasonic Transducer (CMUT) Receivers for Efficient Power

Marta Saccher, Alessandro Stuart Savoia, Rob van Schaijk

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    |March 3, 2025
    PubMed
    Summary

    Capacitive micromachined ultrasonic transducers (CMUTs) with embedded charge storage layers eliminate the need for external bias voltage. Silicon nitride (Si3N4) and thicker dielectric layers enhance performance for wireless power transfer applications.

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