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A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
Ruihong Xiong1, Xuankai Xu1, Yushuai Liu1
1School of Information Science and Technology, ShanghaiTech University, 201210, Shanghai, China.
Microsystems & Nanoengineering
|March 5, 2025
Summary
A novel anti-spring mechanism using curved beams enhances MEMS accelerometers. This design improves sensitivity and reduces noise and bias instability without large forces, enabling device miniaturization.
Area of Science:
- MEMS (Micro-Electro-Mechanical Systems) technology
- Mechanical engineering
- Sensor technology
Background:
- Anti-spring mechanisms are crucial for MEMS accelerometers, improving noise performance via stiffness softening.
- Existing mechanisms necessitate significant bias force and displacement, leading to larger device footprints.
Purpose of the Study:
- To introduce a novel anti-spring mechanism for MEMS accelerometers.
- To achieve stiffness softening with reduced bias force and displacement for miniaturization.
Main Methods:
- Theoretical modeling and Finite Element Method (FEM) simulation to verify stiffness softening.
- Fabrication and testing of a 4.2mm x 4.9mm MEMS capacitive accelerometer prototype incorporating the mechanism.
Main Results:
- The novel mechanism achieved stiffness softening without large bias force or displacement.
- Accelerometer sensitivity increased by 10.4%.
- Noise floor decreased by 10.5% and bias instability by 4.2%.
Conclusions:
- The proposed anti-spring mechanism effectively enhances MEMS accelerometer performance.
- The design facilitates miniaturization of MEMS accelerometers.
- This work presents an innovative approach for improving MEMS sensor technology.
