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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Capacitance-Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays.

Jiahao Chen¹, Xiaohui Yang¹, Mustaqim Siddi Que Iskhandar²

¹Institute of Nanostructure Technologies and Analytics (INA), Technological Electronics Department and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Straße 40, 34132 Kassel, Germany.

|March 6, 2025

Summary

This study analyzes micromirror arrays for smart daylight control. Higher material stiffness and initial tilt angles increase closing threshold voltages, optimizing energy management in green buildings.

Keywords:

MEMS micromirror arrays capacitance–voltage (C-V) measurement electrostatic actuation hinge structure initial tilt angle pull-in voltage

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Area of Science:

Materials Science
MEMS Technology
Sustainable Architecture

Background:

Micromirror arrays are crucial for intelligent active daylight control and energy management in green buildings.
Understanding the electrostatic actuation performance is key to optimizing their efficiency.

Purpose of the Study:

To investigate the electrostatic actuation performance of micromirror arrays.
To analyze the impact of geometric hinge parameters, initial opening angles, and material properties on system functionality.
To provide insights for enhanced energy management in green buildings.

Main Methods:

Utilized capacitive-voltage (C-V) measurement technique for performance analysis.
Examined micromirror arrays with varying hinge structures (full and broken).
Tested different initial tilt angles (90° and 130°) and material layer combinations.

Main Results:

Electrostatic actuation performance was successfully characterized.
Identified that increased Young's modulus of materials raises threshold voltages.
Observed that larger initial tilt angles also increase threshold voltages for micromirror closing.

Conclusions:

Material properties and initial geometry significantly influence micromirror actuation thresholds.
Findings contribute to the design of more efficient active daylight control systems.
Optimized micromirror performance can lead to improved energy management in sustainable buildings.