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Correction: Kang et al. Fluid Flow to Electricity: Capturing Flow-Induced Vibrations with Micro-Electromechanical-System-Based Piezoelectric Energy Harvester. <i>Micromachines</i> 2024, <i>15</i>, 581.

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Updated: May 24, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Progress in RF-MEMS.

¹Department of Electronics, Carleton University, Ottawa, ON K1S 5B6, Canada.

|March 6, 2025

Summary

This summary is machine-generated.

Micro-electro-mechanical systems (MEMS) have significantly advanced, influencing numerous technologies and applications. Continued innovation in MEMS promises further integration and novel functionalities across diverse fields.

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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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Area of Science:

Engineering
Materials Science
Physics

Background:

Micro-electro-mechanical systems (MEMS) have undergone substantial evolution and maturation.
MEMS technology has demonstrated a broad impact across various technological domains and application areas.

Discussion:

The widespread adoption of MEMS highlights their versatility and reliability.
Ongoing research focuses on enhancing MEMS performance and expanding their application scope.

Key Insights:

MEMS integration is crucial for next-generation devices.
The development of MEMS drives innovation in sensing, actuation, and computation.

Outlook:

Future MEMS advancements are expected to enable new functionalities and markets.
Continued exploration of novel materials and fabrication techniques will propel MEMS technology forward.