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Related Experiment Video

Updated: May 7, 2026

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source

Published on: April 4, 2017

Magic Silicon Dioxide for Widely Tunable Photonic Integrated Circuits.

Bruno Lopez-Rodriguez¹, Naresh Sharma¹, Zizheng Li¹

¹Department of Imaging Physics (ImPhys), Faculty of Applied Sciences, Delft University of Technology, 2628 CJ Delft, The Netherlands.

|March 24, 2025

Summary

This summary is machine-generated.

Researchers developed a new method to precisely control the thermo-optic properties of silicon dioxide, enabling bidirectional thermal tuning on a single photonic chip. This breakthrough enhances tunable photonic devices and reduces thermal crosstalk.

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Area of Science:

Photonics and Optical Engineering
Materials Science
Integrated Optics

Background:

Integrated photonic circuits are crucial for data communication, sensing, and optical computing.
Tunable and reconfigurable photonic components commonly use the thermo-optic effect.
Standard materials have limited tuning windows and lack bidirectional thermal tuning capabilities.

Purpose of the Study:

To develop a method for deterministic thermo-optic tuning of photonic devices.
To achieve bidirectional thermal tuning on a single chip.
To improve the tunability and reduce thermal crosstalk in integrated photonic devices.

Main Methods:

Optimized deposition conditions of silicon dioxide using inductively coupled plasma chemical vapor deposition (ICPCVD).
Demonstrated deterministic integration of positive and negative wavelength shifts on amorphous silicon carbide (a-SiC), silicon nitride (SiN), and silicon-on-insulator (SOI) platforms.
Fabricated a tunable coupled ring optical waveguide (CROW) using a single heater and employed low-temperature deposition with lift-off for device isolation.

Main Results:

Achieved deterministic thermo-optic tuning of silicon dioxide without significant optical losses.
Demonstrated bidirectional wavelength shifts on a single chip across multiple photonic platforms.
Observed up to a 10-fold improvement in thermo-optic tunability and athermal ring resonators with shifts as low as 1.5 pm/°C.
Reduced thermal crosstalk by at least 2 orders of magnitude through device isolation.

Conclusions:

The developed ICPCVD method for silicon dioxide enables precise control over thermo-optic properties.
This technique allows for bidirectional thermal tuning on a single photonic chip, a significant advancement.
The findings pave the way for novel photonic architectures with enhanced tunability and reduced thermal crosstalk.