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Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors
1College of Mechanical and Electronic Engineering, Northwest A&F University, Yangling 712100, China.
This study synchronizes large-aperture electromagnetic MEMS mirrors to enhance the detection range of MEMS LiDAR systems for autonomous driving. The synchronized mirrors achieve a 60π mm² aperture, confirming feasibility for improved LiDAR performance.
Area of Science:
- Optoelectronics
- Mechanical Engineering
- Robotics
Background:
- Micro-electro-mechanical systems (MEMS) LiDAR offers advantages for autonomous driving due to cost and size.
- Current MEMS LiDAR has limited detection range stemming from small MEMS mirror apertures.
Purpose of the Study:
- To investigate synchronization methods for large-aperture electromagnetic MEMS mirrors.
- To enhance the detection range of MEMS LiDAR for autonomous vehicles.
Main Methods:
- Constructed a synchronous motion transfer model for electromagnetic MEMS mirrors.
- Performed simulations and experiments to validate synchronization.
Main Results:
- Achieved synchronization of two electromagnetic MEMS mirrors with a 60π mm² aperture.
- Demonstrated synchronization at a 60° field of view and 220 Hz scanning frequency.
- Completed the synchronization process within 10 seconds.
Conclusions:
- The synchronization of large-aperture electromagnetic MEMS mirrors is feasible.
- This method can effectively increase the detection range of MEMS LiDAR systems.
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