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Scanning Mirror Benchmarking Platform Based on Two-Dimensional Position Sensitive Detector and Its Accuracy Analysis.

Hexiang Guo¹, Junya Wang¹, Zheng You¹

¹School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

|March 27, 2025

Summary

This summary is machine-generated.

This study introduces a new benchmark platform for accurately measuring Micro-Electro-Mechanical Systems (MEMS) scanning mirror performance. The developed system precisely quantifies deflection angle, resonance frequency, and angular resolution for advanced applications.

Keywords:

2D-PSD MEMS scanning mirror accuracy analysis benchmark test platform

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Area of Science:

Optoelectronics
Mechanical Engineering
Microsystems Engineering

Background:

Micro-Electro-Mechanical Systems (MEMS) scanning mirrors are crucial components in Lidar, medical imaging, and laser projection displays.
Accurate measurement of MEMS scanning mirror indices is essential for performance verification and defining application scenarios.

Purpose of the Study:

To design and construct a benchmark platform for precise, two-dimensional measurement of MEMS scanning mirror parameters.
To analyze the angular test uncertainty of the developed measurement system.

Main Methods:

Utilized a two-dimensional position-sensitive detector (PSD) to create a scanning mirror benchmark platform.
Developed specific test procedures for measuring deflection angle, resonance frequency, and angular resolution.
Calculated angular test uncertainty, considering optical alignment and PSD measurement errors.

Main Results:

The platform accurately measures MEMS scanning mirror parameters, including deflection angle, resonance frequency, and angular resolution.
With a 100 mm distance between the PSD and mirror, the measurable deflection angle ranges from -6.34° to +6.34°.
Achieved high accuracy, measuring 0.00097° at 0.01° deflection and 0.011° at 6.34° deflection.

Conclusions:

The designed benchmark platform provides accurate and reliable measurements for MEMS scanning mirror performance.
This high-accuracy system can effectively verify the performance and suitability of MEMS scanning mirrors for various applications.