Measurement setup for the characterization of integrated semiconductor circuits at cryogenic temperatures

Area of Science:

• Semiconductor Physics
• Cryogenic Engineering
• Quantum Computing Hardware

Background:

• Cryogenic semiconductor circuits are vital for scaling quantum computing architectures (trapped-ion, superconducting qubits).
• High-frequency, cryogenic measurement systems are essential for characterizing these components.
• Low-temperature detectors also benefit from advanced semiconductor circuits.

Purpose of the Study:

• To present a customizable, high-frequency, fast, and reliable cryogenic measurement setup.
• To enable characterization of semiconductor components from room temperature down to 4.2 K.
• To support applications in quantum computing and low-temperature detection.

Main Methods:

• Developed a cryogenic measurement setup with probes (DC, GSG) up to 67 GHz and 48 twisted pair wires.
• Integrated an optical microscope with machine vision for automated probe positioning within a vacuum chamber.
• Utilized a 550 × 500 × 500 mm³ vacuum chamber with dual pulse tube cryocoolers (up to 0.9 W at 4.2 K).

Main Results:

• Demonstrated successful S-parameter, fT, time-domain, C-V, and DC measurements at cryogenic temperatures.
• Validated the system's capability for characterizing single transistors and integrated circuits.
• Achieved reliable operation from room temperature down to 4.2 K.

Conclusions:

• The developed cryogenic measurement setup reliably characterizes semiconductor components at high frequencies and low temperatures.
• This system is well-suited for the demands of quantum computing and advanced detector applications.
• The automated probe positioning enhances measurement efficiency and accuracy.