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Updated: May 15, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
Eduard-Nicolae Sirjita1,2, Alexandre Boulle2, Jean-Christophe Orlianges1
1XLIM Research Institute, CNRS/University of Limoges, Limoges 87000, France.
Tungsten-doped vanadium dioxide (VO2) films enable efficient terahertz (THz) modulators. These devices offer high modulation depths over broad frequency bands, crucial for future THz communications.
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