Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by

Tomoyuki Tsuyama1, Tatsuki Oyama2, Yu Azuma2

  • 1Resonac Corporation, Research Center for Computational Science and Informatics, 8, Ebisu-cho, Kanagawa-ku, Yokohama, Kanagawa, 221-8517, Japan. tsuyama.tomoyuki.xixae@resonac.com.

Scientific Reports
|April 9, 2025
PubMed
Summary

Heavier inert gas ions more effectively reduce nanoscale surface asperity size on metallic surfaces. This plasma-assisted surface modification method offers better control over material thickness and surface morphology.

Frequently Asked Questions