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Updated: May 15, 2025

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
One million quality factor integrated ring resonators in the mid-infrared
Marko Perestjuk1,2, Rémi Armand1, Miguel Gerardo Sandoval Campos1
1Ecole Centrale de Lyon, INSA Lyon, CNRS, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270, 69130 Ecully, France.
Abstract:
We report ring resonators on a silicon germanium on silicon platform operating in the mid-infrared wavelength range around 3.5-4.6 µm with quality factors reaching up to one million. Advances in fabrication technology enable us to demonstrate such high Q-factors, which put silicon germanium at the forefront of mid-infrared integrated photonic platforms. The achievement of high Q is attested by the observation of degeneracy lifting between clockwise (CW) and counter-clockwise (CCW) resonances, as well as optical bistability due to an efficient power buildup in the rings.
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