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Updated: May 15, 2025

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
One million quality factor integrated ring resonators in the mid-infrared
Marko Perestjuk1,2, Rémi Armand1, Miguel Gerardo Sandoval Campos1
1Ecole Centrale de Lyon, INSA Lyon, CNRS, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270, 69130 Ecully, France.
Silicon Germanium ring resonators achieve quality factors up to one million in the mid-infrared. This breakthrough positions Silicon Germanium as a leading platform for integrated photonics, demonstrated by resonance splitting and optical bistability.
Area of Science:
- Integrated Photonics
- Mid-Infrared Optics
- Materials Science
Background:
- Mid-infrared (MIR) integrated photonics is crucial for sensing and spectroscopy.
- Silicon photonics platforms face limitations in the MIR due to silicon's optical losses.
- Silicon Germanium (SiGe) on Silicon offers a promising alternative for MIR applications.
Purpose of the Study:
- To demonstrate high-quality factor (Q-factor) ring resonators on a SiGe-on-Si platform.
- To operate these resonators in the critical 3.5-4.6 µm wavelength range.
- To validate the performance through observable optical phenomena.
Main Methods:
- Fabrication of SiGe-on-Si ring resonators using advanced lithography and etching techniques.
- Characterization of resonator performance in the 3.5-4.6 µm spectral region.
- Analysis of resonance splitting (degeneracy lifting) and optical bistability.
Main Results:
- Achieved record high Q-factors exceeding one million for SiGe ring resonators.
- Demonstrated stable operation and high performance in the target mid-infrared wavelengths.
- Confirmed high Q-factors via clear observation of clockwise (CW) and counter-clockwise (CCW) resonance degeneracy lifting.
- Observed optical bistability, indicative of significant optical power buildup within the resonators.
Conclusions:
- The SiGe-on-Si platform is highly suitable for high-performance mid-infrared integrated photonics.
- The demonstrated Q-factors rival those of other advanced photonic platforms.
- This work establishes SiGe as a leading material for future MIR photonic integrated circuits.
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