On the selection of broadband monitoring algorithms for optical coating production

Three algorithms for broadband monitoring of optical coating production are compared using computational manufacturing experiments with three fundamentally different optical coating designs. It is shown that for the optimal selection of a broadband monitoring algorithm, it is not enough to consider only the levels of thicknesses errors; it is also necessary to consider the strength of the error self-compensation mechanism. Based on this consideration, recommendations are given for choosing the optimal algorithm for monitoring different types of designs.