High-quality-factor viscoelastic nanomechanical resonators from moiré superlattices

Qin-Yang Zeng1,2, Gui-Xin Su1, Ai-Sheng Song3

  • 1State Key Laboratory of Semiconductor Physics and Chip Technologies, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China.

Nature Communications
|April 22, 2025
PubMed
Abstract