On-Chip Array Fluorescent Sensor for High-Sensitivity Multi-Gas Detection

Yaorong Xiahou1,2,3, Bo Wang4,5, He Li4,5

  • 1School of Microelectronics, Shanghai University, Shangda Road 99, Shanghai 200444, China.

ACS Sensors
|April 25, 2025
PubMed
Summary

This study introduces a miniaturized fluorescent gas sensor array on a silicon nitride photonic chip. The compact device offers high sensitivity and accuracy for detecting volatile organic compounds, enabling lab-on-chip gas sensing applications.