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On-Chip Array Fluorescent Sensor for High-Sensitivity Multi-Gas Detection
Yaorong Xiahou1,2,3, Bo Wang4,5, He Li4,5
1School of Microelectronics, Shanghai University, Shangda Road 99, Shanghai 200444, China.
ACS Sensors
|April 25, 2025
Summary
This study introduces a miniaturized fluorescent gas sensor array on a silicon nitride photonic chip. The compact device offers high sensitivity and accuracy for detecting volatile organic compounds, enabling lab-on-chip gas sensing applications.
Area of Science:
- Photonics
- Chemical Sensing
- Materials Science
Background:
- Fluorescence array sensors offer high sensitivity but often suffer from complex, bulky designs, limiting miniaturization and cost-effectiveness.
- Photonic integration technology presents a viable solution for developing low-cost, miniaturized sensor arrays due to its high integration capabilities.
Purpose of the Study:
- To develop a novel, miniaturized fluorescence array sensor utilizing silicon nitride photonic integration.
- To achieve lab-on-chip functionality for efficient gas detection with enhanced sensitivity and reduced cross-reactivity.
Main Methods:
- Fabrication of a fluorescence array sensor on a silicon nitride photonic integration platform.
- Integration of a microfluidic channel for streamlined gas sample delivery and detection.
- Utilizing high dimensionality and sensitivity of fluorescence arrays for volatile organic compound (VOC) identification.
Main Results:
- The sensor accurately identified six types of volatile organic compounds (VOCs).
- Achieved a low detection limit of 2.8 ppb for N-methylphenethylamine (MPEA).
- Demonstrated high precision in detecting MPEA within complex perfume mixtures, showcasing robustness.
Conclusions:
- The silicon nitride photonic integration platform enables the development of compact, cost-effective, and highly sensitive fluorescence array gas sensors.
- This technology facilitates lab-on-chip gas detection and allows for array expansion without increasing sensor volume.
- The developed sensor shows significant potential for integrated, miniaturized gas sensing applications with improved performance.

