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Updated: May 10, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Design Optimization of RF MEMS-Driven Triangular Resonators with Sierpinski Geometry for Dual-Band Applications
Alina Cismaru1, Flavio Giacomozzi2, Mircea Pasteanu1
1National Institute for Research and Development in Microtechnologies, 077190 Bucharest, Romania.
Abstract:
This paper proposes a detailed design study of resonating high-frequency notch filters driven by RF MEMS switches and their optimization for dual-band operation in the X-Band. Microstrip configurations will be considered for single and dual-band applications. An SPDT (single-pole-double-thru) switch composed of double-clamped ohmic microswitches has been introduced to connect triangular resonators with Sierpinski geometry, symmetrically placed with respect to a microstrip line to obtain a dual notch response. Close frequencies or spans as wide as 2 GHz can be obtained depending on the internal complexity and the edge side. The internal complexity has been modified to introduce the possibility of using the same edge size for the frequency tuning of an elementary cell, maintaining a fixed footprint, and allowing coupled structures to implement high-frequency filters of the same size and variable operational frequencies. Preliminary experimental results have been obtained as a confirmation of the predicted device functionality.
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