Design and Performance Assessment of Biocompatible Capacitive Pressure Sensors with Circular and Square Geometries...

This research outlines the design of capacitive pressure sensors fabricated from three biocompatible materials, featuring both circular and square geometries. The sensors were structured with a dielectric layer positioned between gold-plated electrodes at the top and bottom. Their performance was assessed through simulations conducted with ANSYS Workbench. Of the various sensor configurations tested, the circular design that included two crescent-shaped slots and a 20 µm thick PDMS dielectric material demonstrated the highest sensitivity of 10.68 fF/mmHg. This study further investigated the relationship between resonant frequency shifts and arterial blood pressure, revealing an exceptionally linear response, as evidenced by a Pearson's correlation coefficient of -0.99986 and an R-squared value of 0.99972. This confirmed the sensor's applicability for obtaining precise blood pressure measurements. Additionally, a 3 × 30 mm cobalt-chromium (Co-Cr) stent was obtained, and its inductance was measured using an impedance analyzer.