You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: May 10, 2025

A Guide to Structured Illumination TIRF Microscopy at High Speed with Multiple Colors
Published on: May 30, 2016
1College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China.
This study introduces a novel confocal measurement method using a liquid crystal spatial light modulator (LC-SLM) for advanced micro-nano measurement. The system achieves high-accuracy 3D focusing and spatial positioning for micro-nano fabrication with enhanced speed.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: