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Three-Dimensional Focusing Measurement Method for Confocal Microscopy Based on Liquid Crystal Spatial Light

Yupeng Li1, Yifan Li1

  • 1College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China.

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|April 26, 2025
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Summary

This study introduces a novel confocal measurement method using a liquid crystal spatial light modulator (LC-SLM) for advanced micro-nano measurement. The system achieves high-accuracy 3D focusing and spatial positioning for micro-nano fabrication with enhanced speed.

Keywords:
confocal microscopyliquid crystal spatial light modulatorthree-dimensional focusing technology

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Area of Science:

  • Metrology and Measurement Science
  • Optical Engineering
  • Nanotechnology and Microfabrication

Background:

  • Micro-nano measurement is crucial for advancing micro-nano fabrication technologies.
  • Developing innovative measurement methods drives progress in micro-nano manufacturing.
  • Existing confocal microscopy systems face limitations in adjustment speed and flexibility.

Purpose of the Study:

  • To propose and validate a novel confocal measurement method for non-mechanical 3D focusing and spatial positioning.
  • To enhance the speed and flexibility of micro-nano surface measurements.
  • To improve axial measurement accuracy and resolution in confocal microscopy.

Main Methods:

  • Utilized a liquid crystal spatial light modulator (LC-SLM) to simulate a binary Fresnel lens for 3D focusing.
  • Constructed a confocal microscopy system incorporating the LC-SLM for 3D focusing.
  • Performed lateral and axial focusing experiments to evaluate system performance.

Main Results:

  • Demonstrated the system's capability for freely adjustable lateral focusing positions.
  • Achieved axial measurement accuracy exceeding 1 μm within a 900 μm range.
  • Attained a maximum resolution capability of approximately 16.667 nm.
  • Showcased rapid lateral focusing adjustment without phase map regeneration.

Conclusions:

  • The proposed LC-SLM-based confocal measurement method offers rapid, non-mechanical 3D focusing for micro-nano surfaces.
  • The system provides high axial measurement accuracy and resolution, comparable to existing methods.
  • This approach enhances measurement speed and flexibility, contributing to micro-nano manufacturing advancements.