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  1. Home
  3. A Method To Calibrate Angular Positioning Errors Using A Laser Tracker And A Plane Mirror.
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  3. A Method To Calibrate Angular Positioning Errors Using A Laser Tracker And A Plane Mirror.

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A Method to Calibrate Angular Positioning Errors Using a Laser Tracker and a Plane Mirror.

Bala Muralikrishnan1, Meghan Shilling1, Vincent Lee1

  • 1Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

Sensors (Basel, Switzerland)
|April 28, 2025

View abstract on PubMed

Summary
This summary is machine-generated.

This study presents a novel mirror-based laser tracker method for precise calibration of rotation stage angular errors. The technique achieves sub-arcsecond accuracy, outperforming traditional direct measurement approaches for improved angular positioning.

Keywords:
angular positioning errorlaser trackerrotation stage

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Area of Science:

  • Metrology
  • Optical Engineering
  • Mechanical Engineering

Background:

  • Accurate angular positioning is critical for precision machinery.
  • Existing calibration methods for rotation stages can be limited in accuracy and scope.
  • Laser trackers offer high precision but require robust calibration techniques.

Purpose of the Study:

  • To develop and validate a novel mirror-based method for calibrating angular positioning errors of rotation stages.
  • To compare the performance of the proposed method against a direct measurement approach.
  • To quantify the uncertainty and accuracy of the new calibration technique.

Main Methods:

  • Utilizing a laser tracker (LT) and a plane mirror mounted on the rotation stage.
  • Determining the mirror's normal vector via two LT measurements to a stationary spherically mounted retroreflector (SMR).
  • Employing stationary registration nests to integrate data from multiple LT stations for full 360° coverage.

    • Main Results:

    • The mirror-based method achieved angular positioning errors of ±0.5 arcseconds.
    • This is significantly smaller than the ±1.5 arcseconds error of the direct approach.
    • Simulations estimate the uncertainty of the mirror-based method at 0.4 arcseconds (k=2).

    Conclusions:

    • The developed mirror-based laser tracker method offers superior accuracy for calibrating rotation stage angular errors.
    • The technique is more precise than direct measurement methods, with potential for further uncertainty reduction.
    • Optimal placement of the laser tracker and spherically mounted retroreflector enhances measurement certainty.